Spotting a “Second Growth Front” in ALD Trenches
Atomic Layer Deposition (ALD) is prized for coating deep, high-aspect-ratio (HAR) features. Using Chipmetrics’ PillarHall® lateral HAR test structures, we have now identified an unexpected second growth front that starts at the closed end of the trench and advances toward the entrance, meeting the primary front in the middle. How we saw it Imaging spectroscopic […]
Spatial Atomic Layer Deposition (ALD): Unveiling New Frontiers in Material Processing with Mike van de Poll
Mike van de Poll, a researcher at Eindhoven University of Technology, has dedicated his scientific endeavors to exploring the intricacies of spatial Atomic Layer Deposition (ALD). Supervised by renowned experts in the field, Erwin Kessels and Bart Macco, Mike’s research dives deep into understanding fundamental aspects of spatial ALD, leveraging the advanced capabilities of Chipmetrics’ […]
Chipmetrics Profiles: Professor Henrik Pedersen, Linköping University
Photo: Olov Planthaber, Linköping University
Chipmetrics announces ALD 2024 Academia Contest Winners
Finnish 3D thin film semiconductor metrology specialist rounds up a successful ALD/ALE 2024 conference by announcing international contest winners. Joensuu/Helsinki, Finland – August 23rd, 2024 – Chipmetrics Oy, a leading provider of metrology solutions for the semiconductor industry, announces the winner of its global conformality research competition, held in collaboration with international academic institutions. The […]
PillarHall for exploring the reaction mechanism beyond the conventional conformality measurements
In the fast-paced world of semiconductor manufacturing, the demand for precision and perfection has never been higher. At the heart of this industry’s evolution is the atomic layer deposition (ALD) technique, a critical process for achieving conformal coatings essential for the latest semiconductor technologies. While traditional thermal-ALD has its merits, it’s often limited by high […]
MEIDENSHA uses PillarHall® Test Chip to develop Pure Ozone Generator for ALD applications.
MEIDEN NANOPROCESS INNOVATIONS INC., located in Chiba, Japan, holds significant expertise in the technology of high-concentration and high-purity ozone generators. Ozone, with its varied applications, ranges from disinfecting water and medical equipment to playing a crucial role in surface modification and film formation within the semiconductor industry. In July 2023, at the 23rd International Conference […]
Kokusai Electric relies on patterned 3D substrates in thin film process metrology
Kokusai Electric is one of the leading semiconductor thin film process equipment manufacturers in the world. Recently, in the context of Japan Society of Applied Physics 69th Spring Meeting 2022, Kokusai presented their advanced thin film measurement and analysis concept used in their semiconductor process development. The concept focuses on film thickness and localized film […]