The Chipmetrics ASD-1 test chip features high resolution narrow line structures composed with alternating materials at the planar surface of the silicon substrate.
It is designed for characterizing self-aligned area selective depositions either by the ALD or CVD processes.
Access to narrow line-width patterned test structures is crucial for developing ASD processes.
Chipmetrics’ patterning service allows customers to define and access sub-20 nm test structure features for ASD.
Chipmetrics offers a unique process for patterning sub-20 nm lines on any thin film stacks. This process is unique with easy and fast access to small CD feature size patterning. The process can be used for most materials (dielectrics, metals, metal nitrides, high-k).
Chipmetrics is a leader in the semiconductor 3D metrology, offering cutting-edge solutions for process control through its innovative test chips and wafers.
Our core technologies provide a new perspective in measuring 3D thin films within high aspect ratio device architectures, enabling precise and rapid assessments crucial for development and manufacturing.
We specialize in assisting our clients to develop new materials, optimize deposition processes, and enhance overall yields, significantly accelerating their time to market.
ISO 9001:2015 compliant. IC cleanliness certified
Country of origin: Finland, EU
Registered exporter FIREX31010316
Address: Yliopistokatu 7, Photonics center
80130, Joensuu, Finland
phone: +358 10 348 1344
E-mail: [email protected]
