Chipmetrics Vertical High Aspect Ratio (VHAR1) silicon test chip consists an array of vertical high aspect ratio holes. The holes have a constant hole diameter of 1 µm, and depth of 200 µm over the whole chip area 15 × 15 mm.
Chipmetrics Vertical High Aspect Ratio (VHAR1) silicon test chip consists an array of vertical high aspect ratio holes. The holes have a constant hole diameter of 1 µm, and depth of 200 µm over the whole chip area 15 × 15 mm.
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Chipmetrics is a leader in the semiconductor 3D metrology, offering cutting-edge solutions for process control through its innovative test chips and wafers.
Our core technologies provide a new perspective in measuring 3D thin films within high aspect ratio device architectures, enabling precise and rapid assessments crucial for development and manufacturing.
We specialize in assisting our clients to develop new materials, optimize deposition processes, and enhance overall yields, significantly accelerating their time to market.
ISO 9001:2015 compliant. IC cleanliness certified
Country of origin: Finland, EU
Registered exporter FIREX31010316
Address: Yliopistokatu 7, Photonics center
80130, Joensuu, Finland
phone: +358 10 348 1344
E-mail: [email protected]
