Metrology chips and wafers for semiconductor process control

Chipmetrics measurement service

We help you get conformality information fast and accurately

The Chipmetrics measurement service offers the film penetration depth profile data. The service requires that the deposited sample film is measurable on the Chipmetrics PillarHall® LHAR4 Test Chip.

The service has two types:

  1. Image analysis from the optical microscope digital images 
  2. Line scan optical reflectometer measurement from the PillarHall LHAR4 samples